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Last Updated :2024/12/21



Faculty of Science
Associate professor

Contact Pointa_ohta@fukuoka-u.ac.jp

Researcher information

■ Degree
  • Bachelor (Engineering), Hiroshima University
  • Master (Engineering), Hiroshima University
  • Doctor (Engineering), Hiroshima University
■ Field Of Study
  • Nanotechnology/Materials, Thin-film surfaces and interfaces

Career

■ Career
  • Apr. 2023 - Present
    Fukuoka University, Faculty of Science Department of Applied Physics, Associate Professor
  • Apr. 2020 - Mar. 2023
    国立大学法人東海国立大学機構, 名古屋大学 大学院工学研究科 電子工学専攻, 助教
  • Dec. 2017 - Mar. 2020
    Nagoya University, Graduate School of Engineering Electronics, Assistant Professor
  • Apr. 2017 - Nov. 2017
    Nagoya University, Graduate School of Engineering Electronics, Designated assistant professor
  • May 2015 - Mar. 2017
    Nagoya University, Graduate School of Engineering Department of Quantum Engineering, Designated assistant professor
  • Oct. 2013 - Apr. 2015
    Nagoya University, Graduate School of Engineering, 中核的研究機関研究員
  • Apr. 2009 - Sep. 2013
    Hiroshima University, Graduate School of Advanced Sciences of Matter, 研究員
  • Apr. 2007 - Mar. 2009
    Japan Society for the Promotion of Science, 特別研究員

Research activity information

■ Paper
  • Alignment control of self-assembling Si quantum dots
    Yuki Imai; Ryoya Tsuji; Katsunori Makihara; Noriyuki Taoka; Akio Ohta; Seiichi Miyazaki
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, Aug. 2023, 162
  • Layer transfer of ultrathin Ge crystal segregated on Al/Ge(111) structure
    Keigo Matsushita; Akio Ohta; Shigehisa Shibayama; Tomoharu Tokunaga; Noriyuki Taoka; Katsunori Makihara; Seiichi Miyazaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2023, 62(SG)
  • Formation of ultra-thin NiGe film with single crystalline phase and smooth surface
    Shunsuke Nishimura; Noriyuki Taoka; Akio Ohta; Katsunori Makihara; Seiichi Miyazaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, Apr. 2023, 62(SC)
  • Evaluation of chemical structure and Si segregation of Al/Si(111)
    Taiki Sakai; Akio Ohta; Keigo Matsushita; Noriyuki Taoka; Katsunori Makihara; Seiichi Miyazaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, Apr. 2023, 62(SC)
  • Effects of Cl passivation on Al2O3/GaN interface properties
    Taisei Nagai; Noriyuki Taoka; Akio Ohta; Katsunori Makihara; Seiichi Miyazaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, Jan. 2023, 62(SA)
  • Study on Electron Emission from Phosphorus d-Doped Si-QDs/Undoped Si-QDs Multiple-Stacked Structures
    K. Makihara; T. Takemoto; S. Obayashi; A. Ohta; N. Taoka; S. Miyazaki
    IEICE TRANSACTIONS on Electronics, Oct. 2022, 105-C(10):610 - 615, Refereed
  • Magnetic-Field Dependent Electron Transport of Fe3Si Nanodots
    J. Wu; K. Makihara; H. Zhang; H. Furuhata; N. Taoka; A. Ohta; S. Miyazaki
    IEICE TRANSACTIONS on Electronics, Oct. 2022, 105-C(10):616 - 621, Refereed
  • Impact of substrate heating during Al deposition and post annealing on surface morphology, Al crystallinity, and Ge segregation in Al/Ge(111) structure
    Keigo Matsushita; Akio Ohta; Noriyuki Taoka; Shohei Hayashi; Katsunori Makihara; Seiichi Miyazaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, 01 Jul. 2022, 61(SH)
  • Characterization of electronic charged states of high density self-aligned Si-based quantum dots evaluated with AFM/Kelvin probe technique
    Yuki Imai; Katsunori Makihara; Noriyuki Taoka; Akio Ohta; Seiichi Miyazaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, 01 Jun. 2022, 61(SD)
  • Study on silicidation reaction of Fe nanodots with SiH4
    Hiroshi Furuhata; Katsunori Makihara; Yosuke Shimura; Shuntaro Fujimori; Yuki Imai; Akio Ohta; Noriyuki Taoka; Seiichi Miyazaki
    APPLIED PHYSICS EXPRESS, 01 May 2022, 15(5)
  • Crystal structure change in multilayer GeH flakes by hydrogen desorption under ultrahigh vacuum environments
    Itoh Mai; Araidai Masaaki; Ohta Akio; Nakatsuka Osamu; Kurosawa Masashi
    JAPANESE JOURNAL OF APPLIED PHYSICS, 01 May 2022, 61(SC)
  • Segregation control for ultrathin Ge layer in Al/Ge(111) system
    Akio Ohta; Masato Kobayashi; Noriyuki Taoka; Mistuhisa Ikeda; Katsunori Makihara; Seiichi Miyazaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, 01 Jan. 2022, 61(SA)
  • Effect of substrate temperature on plasma-enhanced self-assembling formation of high-density FePt nanodots
    Shunsuke Honda; Katsunori Makihara; Noriyuki Taoka; Hiroshi Furuhata; Akio Ohta; Daiki Oshima; Takeshi Kato; Seiichi Miyazaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, 01 Jan. 2022, 61(SA)
  • Correlation between structures and vibration properties of germanene grown by Ge segregation
    Shogo Mizuno; Akio Ohta; Toshiaki Suzuki; Hiroyuki Kageshima; Junji Yuhara; Hiroki Hibino
    Applied Physics Express, 01 Dec. 2021, 14(12):125501 - 125501
  • Single germanene phase formed by segregation through Al(111) thin films on Ge(111)
    J. Yuhara; H. Muto; M. Araidai; M. Kobayashi; A. Ohta; S. Miyazaki; S. Takakura; M. Nakatake; G. L. Lay
    2D Materials, Oct. 2021, 8(4):045039 - 045039, Refereed
  • Epitaxial growth of massively parallel germanium nanoribbons by segregation through Ag(110) thin films on Ge(110)
    Yuhara Junji; Shimazu Hiroki; Kobayashi Masato; Ohta Akio; Miyazaki Seiichi; Takakura Sho-ichi; Nakatake Masashi; Le Lay Guy
    APPLIED SURFACE SCIENCE, 01 Jun. 2021, 550, Refereed
  • Surface flattening and Ge crystalline segregation of Ag/Ge structure by thermal anneal
    Akio Ohta; Kenzo Yamada; Hibiki Sugawa; Noriyuki Taoka; Mitsuhisa Ikeda; Katsunori Makihara; Seiichi Miyazaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, 01 May 2021, 60(SB), Refereed
    Lead
  • Energy band diagram for SiO2/Si system as evaluated from UPS analysis under vacuum ultraviolet with variable incident photon energy
    Ohta Akio; Imagawa Takuya; Taoka Noriyuki; Ikeda Mitsuhisa; Makihara Katsunori; Miyazaki Seiichi
    JAPANESE JOURNAL OF APPLIED PHYSICS, 01 Jan. 2021, 60(SA)
    Lead
  • Effect of B-doping on photoluminescence properties of Si quantum dots with Ge core
    Makihara Katsunori; Fujimori Shuntaro; Ikeda Mitsuhisa; Ohta Akio; Miyazaki Seiichi
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, Dec. 2020, 120, Refereed
  • Characterization of photoluminescence from Si quantum dots with B delta-doped Ge core
    Maehara Takuya; Fujimori Shuntaro; Ikeda Mitsuhisa; Ohta Akio; Makihara Katsunori; Miyazaki Seiichi
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 15 Nov. 2020, 119, Refereed
  • Hydrogen desorption from silicane and germanane crystals: Toward creation of free-standing monolayer silicene and germanene
    Masaaki Araidai; Mai Itoh; Masashi Kurosawa; Akio Ohta; Kenji Shiraishi
    Journal of Applied Physics, 28 Sep. 2020, 128(12):125301 - 125301
  • Electron Field Emission from Multiply-Stacked Si Quantum Dots Structures with Graphene Top-Electrode
    T. Niibayashi; T. Takemoto; K. Makihara; A. Ohta; M. Ikeda; S. Miyazaki
    Electrochemical Society (ECS) Transaction, Sep. 2020, 98(5):429 - 434, Refereed
  • Characterization of Magnetic-Field Dependent Electron Transport of Fe3Si Nanodots by Using a Magnetic AFM Probe
    J. Wu; H. Zhang; H. Furuhata; K. Makihara; M. Ikeda; A. Ohta; S. Miyazak
    Electrochemical Society (ECS) Transaction, Sep. 2020, 98(5):493 - 498, Refereed
  • Crystallization of Ge Thin Films on Sapphire(0001) by Thermal Annealing
    H. Sugawa; A. Ohta; M. Kobayashi; N. Taoka; M. Ikeda; K. Makihara; S. Miyazaki
    Electrochemical Society (ECS) Transaction, Sep. 2020, 98(5):505 - 511, Refereed
  • Continuous Growth of Germanene and Stanene Lateral Heterostructures
    Tsuyoshi Ogikubo; Hiroki Shimazu; Yuya Fujii; Koichi Ito; Akio Ohta; Masaaki Araidai; Masashi Kurosawa; Guy Le Lay; Junji Yuhara
    ADVANCED MATERIALS INTERFACES, May 2020, 7(10)
  • Formation of ultrathin segregated-Ge crystal on Al/Ge(111) surface
    Masato Kobayashi; Akio Ohta; Masashi Kurosawa; Masaaki Araidai; Noriyuki Taoka; Tomohiro Simizu; Mitsuhisa Ikeda; Katsunori Makihara; Seiichi Miyazaki
    Japanese Journal of Applied Physics, 01 Apr. 2020, Refereed
  • Impact of surface pre-treatment on Pt-nanodot formation induced by remote H-2-plasma exposure
    Fujimori Shuntaro; Makihara Katsunori; Ikeda Mitsuhisa; Ohta Akio; Miyazaki Seiichi
    JAPANESE JOURNAL OF APPLIED PHYSICS, 01 Aug. 2019, 58
  • Comparative study of photoluminescence properties obtained from SiO2/GaN and Al2O3/GaN structures
    Takada Noriharu; Taoka Noriyuki; Ohta Akio; Yamamoto Taishi; Nguyen Xuan Truyen; Yamada Hisashi; Takahashi Tokio; Ikeda Mitsuhisa; Makihara Katsunori; Shimizu Mitsuaki; Miyazaki Seiichi
    JAPANESE JOURNAL OF APPLIED PHYSICS, 01 Aug. 2019, 58
  • Characterization of Electron Field Emission from Multiple-Stacking Si-Based Quantum Dots
    Futamura Yuto; Makihara Katsunori; Ohta Akio; Ikeda Mitsuhisa; Miyazaki Seiichi
    IEICE TRANSACTIONS ON ELECTRONICS, Jun. 2019, E102C(6):458-461
  • Impact of remote plasma oxidation of a GaN surface on photoluminescence properties
    Takada Noriharu; Taoka Noriyuki; Yamamoto Taishi; Ohta Akio; Nguyen Xuan Truyen; Yamada Hisashi; Takahashi Tokio; Ikeda Mitsuhisa; Makihara Katsunori; Shimizu Mitsuaki; Miyazaki Seiichi
    JAPANESE JOURNAL OF APPLIED PHYSICS, 01 Jun. 2019, 58
  • Evaluation of the potential distribution in a multiple stacked Si quantum dots structure by hard X-ray photoelectron spectroscopy
    Futamura Yuto; Nakashima Yuta; Ohta Akio; Ikeda Mitsuhisa; Makihara Katsunori; Miyazaki Seiichi
    JAPANESE JOURNAL OF APPLIED PHYSICS, Feb. 2019, 58(SA)
  • Characterization of electron charging and transport properties of Si-QDs with phosphorus doped Ge core
    Nagai Ryo; Yamada Kentaro; Fujimori Shuntaro; Ikeda Mitsuhisa; Makihara Katsunori; Ohta Akio; Miyazaki Seiichi
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, Dec. 2018, 33(12)
  • Local Structure of High Performance TiOxPassivating Layer Revealed by Electron Energy Loss Spectroscopy
    T. Mochizuki; K. Gotoh; A. Ohta; Y. Kurokawa; S. Miyazaki; T. Yamamoto; N. Usami
    2018 IEEE 7th WCPEC Proceeding, 29 Nov. 2018, :3896-3899 - 3899, Refereed
  • Germanene Epitaxial Growth by Segregation through Ag(111) Thin Films on Ge(111)
    Yuhara, Junji; Shimazu, Hiroki; Ito, Kouichi; Ohta, Akio; Araidai, Masaaki; Kurosawa, Masashi; Nakatake, Masashi; Le Lay, Guy
    ACS NANO, Nov. 2018, 12(11):11632 - 11637
  • Activation mechanism of TiOx passivating layer on crystalline Si
    Mochizuki, Takeya; Gotoh, Kazuhiro; Ohta, Akio; Ogura, Shohei; Kurokawa, Yasuyoshi; Miyazaki, Seiichi; Fukutani, Katsuyuki; Usami, Noritaka
    APPLIED PHYSICS EXPRESS, Oct. 2018, 11(10)
  • Total photoelectron yield spectroscopy of energy distribution of electronic states density at GaN surface and SiO2/GaN interface
    Akio Ohta; Nguyen Xuan Truyen; Nobuyuki Fujimura; Mitsuhisa Ikeda; Katsunori Makihara; Seiichi Miyazaki
    Japanese Journal of Applied Physics, 01 Jun. 2018, 57(6)
  • Evaluation of resistive switching properties of Si-rich oxide embedded with Ti nanodots by applying constant voltage and current
    Akio Ohta; Yusuke Kato; Mitsuhisa Ikeda; Katsunori Makihara; Seiichi Miyazaki
    Japanese Journal of Applied Physics, 01 Jun. 2018, 57(6)
  • Low-temperature formation of Ga-oxide/GaN interface with remote oxygen plasma and its interface properties
    Taishi Yamamoto; Noriyuki Taoka; Akio Ohta; Nguyen Xuan Truyen; Hisashi Yamada; Tokio Takahashi; Mitsuhisa Ikeda; Katsunori Makihara; Mitsuaki Shimizu; Seiichi Miyazaki
    Japanese Journal of Applied Physics, 01 Jun. 2018, 57(6)
  • Interface properties of SiO2/GaN structures formed by chemical vapor deposition with remote oxygen plasma mixed with Ar or He
    Nguyen Xuan Truyen; Noriyuki Taoka; Akio Ohta; Katsunori Makihara; Hisashi Yamada; Tokio Takahashi; Mitsuhisa Ikeda; Mitsuaki Shimizu; Seiichi Miyazaki
    Japanese Journal of Applied Physics, 01 Jun. 2018, 57(6)
  • Energy band structure and electrical properties of Ga-oxide/GaN interface formed by remote oxygen plasma
    Taishi Yamamoto; Noriyuki Taoka; Akio Ohta; Nguyen Xuan Truyen; Hisashi Yamada; Tokio Takahashi; Mitsuhisa Ikeda; Katsunori Makihara; Osamu Nakatsuka; Mitsuaki Shimizu; Seiichi Miyazaki
    Japanese Journal of Applied Physics, 01 Jun. 2018, 57(6)
  • Growth of two-dimensional Ge crystal by annealing of heteroepitaxial Ag/Ge(111) under N2 ambient
    Ito Koichi; Ohta Akio; Kurosawa Masashi; Araidai Masaaki; Ikeda Mitsuhisa; Makihara Katsunori; Miyazaki Seiichi
    Japanese Journal of Applied Physics, 24 May 2018, 57(6):06HD08 - 06HD08
  • High thermal stability of abrupt SiO2/GaN interface with low interface state density
    Nguyen Xuan Truyen; Noriyuki Taoka; Akio Ohta; Katsunori Makihara; Hisashi Yamada; Tokio Takahashi; Mitsuhisa Ikeda; Mitsuaki Shimizu; Seiichi Miyazaki
    Japanese Journal of Applied Physics, 01 Apr. 2018, 57(4):04FG11, Refereed
  • Direct evaluation of electrical dipole moment and oxygen density ratio at high-k dielectrics/SiO2 interface by X-ray photoelectron spectroscopy analysis
    Nobuyuki Fujimura; Akio Ohta; Mitsuhisa Ikeda; Katsunori Makihara; Seiichi Miyazaki
    Japanese Journal of Applied Physics, 01 Apr. 2018, 57(4):04FB07
  • Segregated SiGe ultrathin layer formation and surface planarization on epitaxial Ag(111) by annealing of Ag/SiGe(111) with different Ge/(Si + Ge) compositions
    Ito Koichi; Ohta Akio; Kurosawa Masashi; Araidai Masaaki; Ikeda Mitsuhisa; Makihara Katsunori; Miyazaki Seiichi
    Japanese Journal of Applied Physics, 09 Mar. 2018, 57(4):04FJ05 - 04FJ05
  • Formation of Mn-germanide nanodots on ultrathin SiO2 induced by remote hydrogen plasma
    Yinghui Wen; Katsunori Makihara; Akio Ohta; Mitsuhisa Ikeda; Seiichi Miyazaki
    Japanese Journal of Applied Physics, 01 Jan. 2018, 57(1)
  • Electroluminescence of superatom-like Ge-core/Si-shell quantum dots by alternate field-effect-induced carrier injection
    Katsunori Makihara; Mitsuhisa Ikeda; Nobuyuki Fujimura; Kentaro Yamada; Akio Ohta; Seiichi Miyazaki
    Applied Physics Express, 01 Jan. 2018, 11(1)
  • Characterization of remote O2-plasma-enhanced CVD SiO2/GaN(0001) structure using photoemission measurements
    Nguyen Xuan Truyen; Akio Ohta; Katsunori Makihara; Mitsuhisa Ikeda; Seiichi Miyazaki
    Japanese Journal of Applied Physics, 01 Jan. 2018, 57(1)
  • High Density Formation and Magnetoelectronic Transport Properties of Fe3Si Nanodots
    H. Zhang; K. Makihara; M. Ikeda; A. Ohta; S. Miyazaki
    Electrochemical Society Transaction, 2018, 86(7):131 - 138, Refereed
  • Impact of phosphorus doping to multiple-stacked Si quantum dots on electron emission properties
    Daichi Takeuchi; Katsunori Makihara; Akio Ohta; Mitsuhisa Ikeda; Seiichi Miyazaki
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, Nov. 2017, 70:183 - 187
  • First-principles study on adsorption structure and electronic state of stanene on alpha-alumina surface
    Masaaki Araidai; Masashi Kurosawa; Akio Ohta; Kenji Shiraishi
    JAPANESE JOURNAL OF APPLIED PHYSICS, Sep. 2017, 56(9)
  • Characterization of Interfacial Dipoles at Dielectric Stacks by XPS Analysis
    S. Miyazaki; A. Ohta; N. Fujimura
    Electrochemical Society Transaction, Sep. 2017, 80(1):229-235
  • Magnetoelectronic transport of double stack FePt nanodots
    Katsunori Makihara; Taiga Kawase; Akio Ohta; Mitsuhisa Ikeda; Seiichi Miyazaki
    APPLIED PHYSICS LETTERS, Jul. 2017, 111(5)
  • Low-temperature formation of crystalline Si:H/Ge:H heterostructures by plasma-enhanced CVD in combination with Ni-nanodots seeding nucleation
    Yimin Lu; Katsunori Makihara; Daichi Takeuchi; Mitsuhisa Ikeda; Akio Ohta; Seiichi Miyazaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2017, 56(6)
  • Potential changes and chemical bonding features for Si-MOS structure as evaluated from HAXPES analysis
    Akio Ohta; Hideki Murakami; Mitsuhisa Ikeda; Katsunori Makihara; Eiji Ikenaga; Seiichi Miyazaki
    MICROELECTRONIC ENGINEERING, Jun. 2017, 178:80 - 84
  • Evaluation of energy distribution of filled defects of Si oxide thin films from total photoelectron yield spectroscopy
    Akio Ohta; Mitsuhisa Ikeda; Katsunori Makihara; Seiichi Miyazaki
    MICROELECTRONIC ENGINEERING, Jun. 2017, 178:85 - 88
  • Embedding of Ti Nanodots into SiOx and Its Impact on Resistance Switching Behaviors
    Yusuke Kato; Akio Ohta; Mitsuhisa Ikeda; Katsunori Makihara; Seiichi Miyazaki
    IEICE TRANSACTIONS ON ELECTRONICS, May 2017, E100C(5):468 - 474
  • Photoemission Study of Gate dielectrics on Gallim Nitride
    S. Miyazaki; N. Truyen; A. Ohta; T. Yamamoto
    Electrochemical Society Transaction, May 2017, 79(1):119-127
  • Photoemission study on electrical dipole at SiO2/Si and HfO2/SiO2 interfaces
    Nobuyuki Fujimura; Akio Ohta; Mitsuhisa Ikeda; Katsunori Makihara; Seiichi Miyazaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, Apr. 2017, 56(4)
  • Processing and characterization of Si/Ge quantum dots
    S. Miyazaki; K. Makihara; A. Ohta; M. Ikeda
    Technical Digest - International Electron Devices Meeting, IEDM, 31 Jan. 2017, :33.2.1 - 33.2.4, Refereed
  • High-density formation of Ta nanodot induced by remote hydrogen plasma
    Yaping Wang; Daichi Takeuchi; Akio Ohta; Mitsuhisa Ikeda; Katsunori Makihara; Seiichi Miyazaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, Jan. 2017, 56(1)
  • Effects of remote hydrogen plasma on chemical bonding features and electronic states of 4H-SiC(0001) surface
    Nguyen Xuan Truyen; Akio Ohta; Katsunori Makihara; Mitsuhisa Ikeda; Seiichi Miyazaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, Jan. 2017, 56(1)
  • Nano spin-diodes using FePt-NDs with huge on/off current ratio at room temperature
    Katsunori Makihara; Takeshi Kato; Yuuki Kabeya; Yusuke Mitsuyuki; Akio Ohta; Daiki Oshima; Satoshi Iwata; Yudi Darma; Mitsuhisa Ikeda; Seiichi Miyazaki
    SCIENTIFIC REPORTS, Sep. 2016, 6:33409(7pages), Refereed
  • Surface-segregated Si and Ge ultrathin films formed by Ag-induced layer exchange process
    Kurosawa Masashi; Ohta Akio; Araidai Masaaki; Zaima Shigeaki
    Japanese Journal of Applied Physics, 05 Jul. 2016, 55(8):08NB07 - 08NB07, Refereed
  • Evaluation of Valence Band Top and Electron Affinity of SiO2 and Si-based Semiconductors Using XPS
    N. Fujimura; A. Ohta; K. Makihara; S. Miyazaki
    Japanese Journal of Applied Physics, Jul. 2016, 55(8S2):08PC06(5pages), Refereed
  • Impact of Embedded Mn Nanodots on Resistive Switching Characteristics of Si-rich Oxides as Measured in Ni-Electrodes MIM Diodes
    T. Arai; A. Ohta; K. Makihara; S. Miyazaki
    Japanese Journal of Applied Physics, May 2016, 55(6S1):06GH07(5pages), Refereed
  • Study on electroluminescence from multiply-stacking valency controlled Si quantum dots
    Takahisa Yamada; Katsunori Makihara; Akio Ohta; Mitsuhisa Ikeda; Seiichi Miyazaki
    THIN SOLID FILMS, Mar. 2016, 602(1):48 - 51, Refereed
  • Evaluation of field emission properties from multiple-stacked Si quantum dots
    Daichi Takeuchi; Katsunori Makihara; Akio Ohta; Mitsuhisa Ikeda; Seiichi Miyazaki
    THIN SOLID FILMS, Mar. 2016, 602(1):68 - 71, Refereed
  • Bonding and Energy Alignment at Metal/TiO2 interfaces: A Density Functional Theory Study
    H. Chen; P. Li; N. Umezawa; H. Abe; J. Ye; K. Shiraishi; A. Ohta; S. Miyazaki
    The Journal of Physical Chemistry, Feb. 2016, 120(10):5549-5556, Refereed
  • Evaluation of dielectric function of thermally-grown SiO2 and GeO2 from energy loss signals for XPS core-line photoelectrons
    Taishi Yamamoto; Akio Ohta; Mitsuhisa Ikeda; Katsunori Makihara; Seiichi Miyazaki
    ECS Transactions, 2016, 75(8):777 - 783, Refereed
  • Effect of Ge core size on photoluminescence from Si quantum dots with Ge core
    Kentaro Yamada; Keigo Kondo; Katsunori Makihara; Mitsuhisa Ikeda; Akio Ohta; Seiichi Miyazaki
    ECS Transactions, 2016, 75(8):695 - 700, Refereed
  • Formation and Characterization of High Density FeSi Nanodots on SiO2 Induced by Remote H2 Plasma
    H. Zhang; K. Makihara; A. Ohta; M. Ikeda; S. Miyazaki
    Japanese Journal of Applied Physics, Dec. 2015, 55(1S):01AE20 (4pages), Refereed
  • The Interface Analysis of GaN Directly Grown on 0º off 6H-SiC
    Z. Sun; A. Ohta; S. Miyazaki; K. Nagamatsu; M. Olsson; Z. Ye; M. Deki; Y. Honda; H. Amano
    Japanese Journal of Applied Physics, Dec. 2015, 55(1):10303 - 10303, Refereed
  • High Density Formation of FePt Alloy Nanodots Induced by Remote Hydrogen Plasma and Characterization of their Magnetic Properties
    R. Fukuoka; K. Makihara; H. Zhang; A. Ohta; T. Kato; S. Iwata; M. Ikeda; S. Miyazaki
    Transactions of the Materials Research Society of Japan, Dec. 2015, 40(4):347-350, Refereed
  • Increase in the work function of W/WO3 by helium plasma irradiation
    S. Kajita; A. Ohta; T. Ishida; K. Makihara; T. Yoshida; N. Ohno
    Japanese Journal of Applied Physics, Nov. 2015, 54(12):126201(6pages), Refereed
  • High-Resolution Photoemission Study of High-k Dielectric Bilayer Stack on Ge(100)
    S. Miyazaki; A. Ohta
    Electrochemical Society Transaction, Oct. 2015, 69(10):165-170, Refereed
  • Photoemission Study on Chemical Bonding Features and Electronic Defect States of Thermally-grown SiO2/4H-SiC Structure
    H. Watanabe; A. Ohta; K. Makihara; S. Miyazaki
    Electrochemical Society Transaction, Oct. 2015, 69(10):179-186, Refereed
  • Progress in determination method for ultrathin Si-based oxide bandgaps from analysis of energy loss signals for photoelectrons
    Akio Ohta; Hideki Murakami; Katsunori Makihara; Seiichi Miyazaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2015, 54(6):06FH08(5pages), Refereed
  • Electronic Defect States in Thermally-grown SiO2/4H-SiC Structure Measured by Total Photoelectron Yield Spectroscopy
    A. Ohta; K. Makihara; S. Miyazaki
    Microelectronic Engineering, May 2015, 147:264-268, Refereed
  • Resistance-Switching Characteristics of Si-rich Oxide Evaluated by Using Ni Nanodots as Electrodes in Conductive AFM Measurements
    Akio Ohta; Chong Liu; Takashi Arai; Daichi Takeuchi; Hai Zhang; Katsunori Makihara; Seiichi Miyazaki
    IEICE TRANSACTIONS ON ELECTRONICS, May 2015, E98C(5):406 - 410, Refereed
  • Resistive switching characteristics of Si-rich oxides with embedding Ti nanodots
    Yusuke Kato; Takashi Arai; Akio Ohta; Katsunori Makihara; Seiichi Miyazaki
    ECS Transactions, 2015, 69(10):291 - 298, Refereed
  • Properties of Al Ohmic Contacts to n-type 4H-SiC employing a Phosphorus-Doped and Crystallized Amorphous-Silicon Interlayer
    Hiroaki Hanafusa; Akio Ohta; Ryuuhei Ashihara; Keisuke Maruyama; Tsubasa Mizuno; Shohei Hayashi; Hideki Murakami; Seiichiro Higashi
    SILICON CARBIDE AND RELATED MATERIALS 2013, PTS 1 AND 2, 2014, 778-780:649 - 652, Refereed
  • Characterization of Chemical Bonding Features and Interfacial Reactions in Ge-MIS Structure with HfO2/TaGexOy Dielectric Stack
    Akio Ohta; Hideki Murakami; Kuniaki Hashimoto; Katsunori Makihara; Seiichi Miyazaki
    SIGE, GE, AND RELATED COMPOUNDS 6: MATERIALS, PROCESSING, AND DEVICES, 2014, 64(6):241 - 248, Refereed
  • Pre-Amorphization and Low-Temperature Implantation for Efficient Activation of Implanted As in Ge(100)
    Hideki Murakami; Shinya Hamada; Takahiro Ono; Kuniaki Hashimoto; Akio Ohta; Hiroaki Hanafusa; Seiichiro Higashi; Seiichi Miyazaki
    SIGE, GE, AND RELATED COMPOUNDS 6: MATERIALS, PROCESSING, AND DEVICES, 2014, 64(6):423 - 429, Refereed
  • Characterization of Electron Emission from High Density Self-aligned Si-based Quantum Dots by Conducting-Probe Atomic Force Microscopy
    Daichi Takeuchi; Katsunori Makihara; Akio Ohta; Mitsuhisa Ikeda; Seiichi Miyazaki
    SIGE, GE, AND RELATED COMPOUNDS 6: MATERIALS, PROCESSING, AND DEVICES, 2014, 64(6):923 - 928, Refereed
  • Photoluminescence Study of Si Quantum Dots with Ge Core
    Katsunori Makihara; Keigo Kondo; Mitsuhisa Ikeda; Akio Ohta; Seiichi Miyazaki
    SIGE, GE, AND RELATED COMPOUNDS 6: MATERIALS, PROCESSING, AND DEVICES, 2014, 64(6):365 - 370, Refereed
  • Characterization of resistive switching behaviors of RF sputtered Si oxide resistive random access memories with Ti-based electrodes
    Akio Ohta; Motoki Fukusima; Katsunori Makihara; Hideki Murakami; Seiichiro Higashi; Seiichi Miyazaki
    Japanese Journal of Applied Physics, Nov. 2013, 52(11):11NJ06, Refereed
  • Resistive Switching Properties of SiOx/TiO2 Multi-Stack in Ti-electrode MIM Diodes
    A. Ohta; K. Makihara; M. Fukusima; H. Murakami; S. Higashi; S. Miyazaki
    Electrochemical Society Transaction, Oct. 2013, 58(9):293-300, Refereed
  • Evaluation of Chemical Composition and Bonding Features of Pt/SiOx/Pt MIM Diodes and Its Impact on Resistance Switching Behavior
    Akio Ohta; Katsunori Makihara; Mitsuhisa Ikeda; Hideki Murakami; Seiichiro Higashi; Seiichi Miyazaki
    IEICE TRANSACTIONS ON ELECTRONICS, May 2013, E96C(5):702 - 707, Refereed
  • X-ray Photoemission Study of SiO2/Si/Si0.55Ge0.45/Si Heterostructures
    A. Ohta; K. Makihara; S. Miyazaki; M. Sakuraba; J. Murota
    IEICE TRANSACTIONS on Electronics, May 2013, E96-C(5):680-685
  • Control of Interfacial Reaction of HfO2/Ge Structure by Insertion of Ta Oxide Layer
    Kuniaki Hashimoto; Akio Ohta; Hideki Murakami; Seiichiro Higashi; Seiichi Miyazaki
    IEICE TRANSACTIONS ON ELECTRONICS, May 2013, E96C(5):674 - 679, Refereed
  • Characterization of Resistive Switching of Pt/Si-Rich Oxide/TiN System
    Motoki Fukusima; Akio Ohta; Katsunori Makihara; Seiichi Miyazaki
    IEICE TRANSACTIONS ON ELECTRONICS, May 2013, E96C(5):708 - 713, Refereed
  • XPS Study of Energy Band Alignment between Hf-La Oxides and Si(100)
    A. Ohta; H. Murakami; S. Higashi; S. Miyazaki
    Transactions of the Materials Research Society of Japan, Apr. 2013, 38(3):353-357, Refereed
  • High thermal stability of abrupt SiO2/GaN interface with low interface state density
    N. Truyen; N. Taoka; A. Ohta; K. Makihara; H. Yamada; T. Takahashi; M. Ikeda; M. Shimizu; S. Miyazaki
    Japanese Journal of Applied Physics, Mar. 2013, 57(4S):04FG11
  • Determination of Energy Band Alignment in Ultrathin Hf-based Oxide/Pt System
    A. Ohta; H. Murakami; S. Higashi; S. Miyazaki
    15TH INTERNATIONAL CONFERENCE ON THIN FILMS (ICTF-15), 2013, 417(1):012012(6pages), Refereed
  • Characterization of Ultrathin Ta-oxide Films Formed on Ge(100) by ALD and Layer-by-Layer Methods
    K. Mishima; H. Murakami; A. Ohta; S. K. Sahari; T. Fujioka; S. Higashi; S. Miyazaki
    15TH INTERNATIONAL CONFERENCE ON THIN FILMS (ICTF-15), 2013, 417(1):012013, Refereed
  • Kinetics of thermally oxidation of Ge(100) surface
    S. K. Sahari; A. Ohta; M. Matsui; K. Mishima; H. Murakami; S. Higashi; S. Miyazaki
    Journal of Physics: Conference Series, 2013, 417(1):012014(6pages), Refereed
  • Evaluation of Chemical Bonding Features and Resistance Switching Behaviors of Ultrathin Si Oxide Dielectric Sandwiched Between Pt Electrodes
    Akio Ohta; Yuta Goto; Shingo Nishigaki; Hideki Murakami; Seiichiro Higashi; Seiichi Miyazaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2012, 51(6):06FF02, Refereed
  • Characterization of Resistance-Switching of Si Oxide Dielectrics Prepared by RF Sputtering
    Akio Ohta; Yuta Goto; Shingo Nishigaki; Guobin Wei; Hideki Murakami; Seiichiro Higashi; Seiichi Miyazaki
    IEICE TRANSACTIONS ON ELECTRONICS, May 2012, E95C(5):879 - 884, Refereed
  • Layer transfer and simultaneous activation of phosphorus atoms in silicon films by near-infrared semiconductor diode laser irradiation
    Yoshitaka Kobayashi; Kohei Sakaike; Shogo Nakamura; Mitsuhisa Ikeda; Akio Ohta; Seiichiro Higashi
    Materials Research Society Symposium Proceedings, 2012, 1426:275 - 280, Refereed
  • Control of Schottky Barrier Height at Al/p-Ge Junctions by Ultrathin Layer Insertion
    A. Ohta; M. Matsui; H. Murakami; S. Higashi; S. Miyazaki
    SIGE, GE, AND RELATED COMPOUNDS 5: MATERIALS, PROCESSING, AND DEVICES, 2012, 50(9):449 - 457, Refereed
  • Characterization of Resistance-Switching Properties of SiOx Films Using Pt Nanodots Electrodes
    Katsunori Makihara; Motoki Fukushima; Akio Ohta; Mitsuhisa Ikeda; Seiichi Miyazaki
    SIGE, GE, AND RELATED COMPOUNDS 5: MATERIALS, PROCESSING, AND DEVICES, 2012, 50(9):459 - 464, Refereed
  • X-ray Photoelectron Spectroscopy Study of Interfacial Reactions between Metal and Ultrathin Ge Oxide
    Akio Ohta; Tomohiro Fujioka; Hideki Murakami; Seiichiro Higashi; Seiichi Miyazaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, Oct. 2011, 50(10):10PE01, Refereed
  • Evaluation of Chemical Structure and Resistance Switching Characteristics of Undoped Titanium Oxide and Titanium-Yttrium Mixed Oxide
    Akio Ohta; Yuta Goto; Guobin Wei; Hideki Murakami; Seiichiro Higashi; Seiichi Miyazaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, Oct. 2011, 50(10):10PH02, Refereed
  • Characterization of chemical bonding features at metal/GeO2 Interfaces by X-ray photoelectron spectroscopy
    Masafumi Matsui; Hideki Murakami; Tomohiro Fujioka; Akio Ohta; Seiichiro Higashi; Seiichi Miyazaki
    MICROELECTRONIC ENGINEERING, Jul. 2011, 88(7):1549 - 1552, Refereed
  • Impact of insertion of ultrathin TaOx, layer at the Pt/TiO2 interface on resistive switching characteristics
    Guobin Wei; Hideki Murakami; Tomohiro Fujioka; Akio Ohta; Yuta Goto; Seiichiro Higashi; Seiichi Miyazaki
    MICROELECTRONIC ENGINEERING, Jul. 2011, 88(7):1152 - 1154, Refereed
  • The Impact of Y Addition into TiO2 on Electronic States and Resistive Switching Characteristics
    Akio Ohta; Yuta Goto; Mohd Fairuz Kazalman; Guobin Wei; Hideki Murakami; Seiichiro Higashi; Seiichi Miyazaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2011, 50(6):06GG01, Refereed
  • High-density formation of Ge quantum dots on SiO2
    Katsunori Makihara; Mitsuhisa Ikeda; Akio Ohta; Shotaro Takeuchi; Yosuke Shimura; Shigeaki Zaima; Seiichi Miyazaki
    SOLID-STATE ELECTRONICS, Jun. 2011, 60(1):65 - 69, Refereed
  • Impact of Annealing Ambience on Resistive Switching in Pt/TiO2/Pt Structure
    Guobin Wei; Yuta Goto; Akio Ohta; Katsunori Makihara; Hideki Murakami; Seiichiro Higashi; Seiichi Miyazaki
    IEICE TRANSACTIONS ON ELECTRONICS, May 2011, E94C(5):699 - 704, Refereed
  • Activation of As Atoms in Ultrashallow Junction during Milli- and Microsecond Annealing Induced by Thermal-Plasma-Jet Irradiation
    Kazuya Matsumoto; Akio Ohta; Seiichi Miyazaki; Seiichiro Higashi
    JAPANESE JOURNAL OF APPLIED PHYSICS, Apr. 2011, 50(4):04DA07, Refereed
  • Native Oxidation Growth on Ge(111) and (100) Surfaces
    Siti Kudnie Sahari; Hideki Murakami; Tomohiro Fujioka; Tatsuya Bando; Akio Ohta; Katsunori Makihara; Seiichiro Higashi; Seiichi Miyazaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, Apr. 2011, 50(4):04DA12, Refereed
  • Characterization of Mg diffusion into HfO2/SiO 2/Si(100) stacked structures and its impact on detect state densities
    Akio Ohta; Daisuke Kanme; Hideki Murakami; Seiichiro Higashi; Seiichi Miyazaki
    IEICE Transactions on Electronics, 2011, E94-C(5):717 - 723, Refereed
  • Electron and hole components of tunneling currents through an interfacial oxide-high-k gate stack in metal-oxide-semiconductor capacitors
    Fatimah A. Noor; Mikrajuddin Abdullah; Sukirno; Khairurrijal; Akio Ohta; Seiichi Miyazaki
    JOURNAL OF APPLIED PHYSICS, Nov. 2010, 108(9):093711, Refereed
  • Contribution of Carbon to Growth of Boron-Containing Cluster in Heavily Boron-Doped Silicon
    Hiroshi Itokawa; Akio Ohta; Mitsuhisa Ikeda; Ichiro Mizushima; Seiichi Miyazaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, Aug. 2010, 49(8):081301, Refereed
  • Self-Align Formation of Si Quantum Dots
    K. Makihara; M. Ikeda; H. Deki; A. Ohta; S. Miyazaki
    SIGE, GE, AND RELATED COMPOUNDS 4: MATERIALS, PROCESSING, AND DEVICES, 2010, 33(6):661 - 667, Refereed
  • Characterization of Interfaces between Chemically Cleaned or Thermally Oxidized Germanium and Metals
    Hideki Murakami; Tomohiro Fujioka; Akio Ohta; Tatsuya Bando; Seiichiro Higashi; Seiichi Miyazaki
    SIGE, GE, AND RELATED COMPOUNDS 4: MATERIALS, PROCESSING, AND DEVICES, 2010, 33(6):253 - 262, Refereed
  • Characterization of interfacial reaction and chemical bonding features of LaOx/HfO2 stack structure formed on thermally-grown SiO2/Si(100)
    Akio Ohta; Daisuke Kanme; Hideki Murakami; Seiichiro Higashi; Seiichi Miyazaki
    MICROELECTRONIC ENGINEERING, Jul. 2009, 86(7-9):1650 - 1653, Refereed
  • Electronic Charged States of Pt-silicide Nanodots as Evaluated by Using an AFM/Kelvin Probe Technique
    K. Makihara; K. Shimanoe; M. Ikeda; A. Ohta; S. Higashi; S. Miyazaki
    Transactions of Materials Research Society of Japan, Jun. 2009, 34(2):309-312 - 312, Refereed
  • Photoemission study of fully silicided Pd2Si gates with interface modification induced by dopants
    Takuji Hosoi; Akio Ohta; Seiichi Miyazaki; Hiroyuki Shiraishi; Kentaro Shibahara
    Applied Physics Letters, 2009, 94(19):192102, Refereed
  • Surface potential changes induced by physisorption of Si-tagged protein A on HF-last Si(100) and thermally grown SiO2 surfaces
    S. Mahboob; K. Makihara; A. Ohta; S. Higashi; Y. Hata; A. Kuroda; S. Miyazaki
    ECS Transactions, 2009, 19(22):35 - 43, Refereed
  • The influence of defects and impurities on electrical properties of high high - k diele dielectrics trics
    J. Da̧browski; S. Miyazaki; S. Inumiya; G. Kozłowski; G. Lippert; G. Łu-Pina; Y. Nara; H. J. Müssig; A. Ohta; Y. Pei
    Materials Science Forum, 2009, 608:55 - 109, Refereed
  • Interface properties and effective work function of Sb-predoped fully silicided NiSi gate
    Takuji Hosoi; Kosuke Sano; Akio Ohta; Katsunori Makihara; Hirotaka Kaku; Seiichi Miyazaki; Kentaro Shibahara
    SURFACE AND INTERFACE ANALYSIS, Jun. 2008, 40(6-7):1126 - 1130, Refereed
  • Theoretical investigation of metal/dielectric interfaces-breakdown of schottky barrier limits
    Kenji Shiraishi; Takashi Nakayama; Takashi Nakaoka; Akio Ohta; Seiichi Miyazaki
    ECS Transactions, 2008, 13(2):21 - 27, Refereed
  • Photoemission study of Metal/HfSiON gate stack
    S. Miyazaki; H. Yoshinaga; A. Ohta; Y. Akasaka; K. Shiraishi; K. Yamada; S. Inumiya; M. Kadoshima; Y. Nara
    ECS Transactions, 2008, 13(2):67 - 73, Refereed
  • Performance improvement of HfAlOxN n-channel metal-oxide-semiconductor field-effect transistors by controlling the bonding configuration of nitrogen atoms coordinated to Hf atoms
    Kunihiko Iwamoto; Tomoaki Nishimura; Akio Ohta; Koji Tominaga; Toshihide Nabatame; Seiichi Miyazaki; Akira Toriumi
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, Dec. 2007, 46(12):7666 - 7670, Refereed
  • Characterization of chemical bonding features and defect state density in HfSiOxNy/SiO2 gate stack
    A. Ohta; Y. Munetaka; A. Tsugou; K. Makihara; H. Murakami; S. Higashi; S. Miyazaki; S. Inumiya; Y. Nara
    Microelectronic Engineering, Oct. 2007, 84(9-10):169-180, Refereed
  • Theoretical studies on metal/high-k gate stacks
    Kenji Shiraishi; Yasushi Akasaka; Genji Nakamura; Takashi Nakayama; Seiichi Miyazaki; Heiji Watanabe; Akio Ohta; Kenji Ohmori; Toyohiro Chikyow; Yasuo Nara; Kikuo Yamabe; Keisaku Yamada
    ECS Transactions, 2007, 6(1):191 - 204, Refereed
  • Theoretical studies on fermi level pining of Hf-based high-k gate stacks based on thermodynamics
    K. Shiraishi; Y. Akasaka; G. Nakamura; M. Kadoshima; H. Watanabe; A. Ohta; S. Miyazaki; K. Ohmori; T. Chikyow; K. Yamabe; Y. Nara; Y. Ohji; K. Yamada
    ECS Transactions, 2007, 11(4):125 - 133, Refereed
  • Improvement in fermi-level pinning of p-MOS metal gate electrodes on HfSiON by employing Ru gate electrodes
    M. Kadoshima; Y. Sugita; K. Shiraishi; H. Watanabe; A. Ohta; S. Miyazaki; K. Nakajima; T. Chikyow; K. Yamada; T. Aminaka; E. Kurosawa; T. Matsuki; T. Aoyama; Y. Nara; Y. Ohji
    ECS Transactions, 2007, 11(4):169 - 180, Refereed
  • Photoemission study of ultrathin GeO2/Ge heterostructures formed by UV-O3 oxidation
    Akio Ohta; Hiroshi Nakagawa; Hideki Murakami; Seiichirou Higashi; Seiichi Miyazaki
    e-Journal of Surface Science and Nanotechnology, 10 Feb. 2006, 4:174 - 179, Refereed
  • Photoemission study of ultrathin HfSiON/Si(100) systems
    A. Ohta; H. Nakagawa; H. Murakami; S. Higashi; S. Miyazaki; S. Inumiya; Y. Nara
    Transactions of the Materials Research Society of Japan, Vol 31, No 1, 2006, 31(1):125 - 128, Refereed
  • Characterization of FUSI-PtSi formed on ultrathin HfO2/Si(100) by photoelectron spectroscopy
    Y. Munetaka; F. Takeno; A. Ohta; H. Murakami; S. Higashi; S. Miyazaki; M. Kadoshima; T. Nabatame
    Transactions of the Materials Research Society of Japan, Vol 31, No 1, 2006, 31(1):145 - 148, Refereed
  • Influence of thermal annealing on defect states and chemical structures in ultrathin Al2O3/SiNx/poly-Si
    M. Taira; A. Ohta; H. Nakagawa; S. Miyazaki; K. Komeda; M. Horikawa; K. Koyama
    Transactions of the Materials Research Society of Japan, Vol 31, No 1, 2006, 31(1):149 - 152, Refereed
  • Nitridation of Ge(100) surfaces by vacuum-ultra violet (VUV) irradiation in NH3 ambience
    H. Nakagawa; A. Ohta; M. Taira; H. Abe; H. Murakami; S. Higashi; S. Miyazaki
    Transactions of the Materials Research Society of Japan, Vol 31, No 1, 2006, 31(1):153 - 156, Refereed
  • Impact of nitrogen incorporation into yttrium oxide on chemical bonding features and electrical properties
    Hiroyuki Abe; Hiroshi Nakagawa; Masahiro Taira; Akio Ohta; Seiichiro Higashi; Seiichi Miyazaki
    Transactions of the Materials Research Society of Japan, Vol 31, No 1, 2006, 31(1):157 - 160, Refereed
  • Depth profiling of chemical and electronic structures and defects of ultrathin HfSiON on Si(100)
    S. Miyazaki; A. Ohta; S. Inumiya; Y. Nara; K. Yamada
    ECS Transactions, 2006, 3(3):171 - 180, Refereed
  • Physics of metal/high-k interfaces
    Takashi Nakayama; Kenji Shiraishi; Seiichi Miyazaki; Yasushi Akasaka; Takashi Nakaoka; Kazuyoshi Torii; Akio Ohta; Parhat Ahmet; Kenji Ohmori; Naoto Umezawa; Heiji Watanabe; Toyohiro Chikyow; Yasuo Nara; Hiroshi Iwai; Keisaku Yamada
    ECS Transactions, 2006, 3(3):129 - 140, Refereed
  • Characterization of Sb-Doped Fully-Silicided NiSi/SiO2/Si MOS Structure
    T. Hosoi; K. Sano; M. Hino; A. Ohta; K. Mikihara; H. Kaku; S. Miyazaki; K. Shibahara
    Abstracts of 2005 International Semiconductor Device Research Symposium (ISDRS2005, Bethesda, Maryland, USA), Dec. 2005, Refereed
  • Analysis of Leakage Current through Al/HfAlOx/SiONx/Si(100) MOS Capacitors
    S. Nagamachi; A. Ohta; F. Takeno; H. Nakagawa; H. Murakami; S. Miyazaki; T. Kawahara; K. Torii
    Transactions of the Materials Research Society of Japan, Mar. 2005, 30(1):197-200, Refereed
  • Impact of Rapid Thermal Anneal on ALCVD-Al2O3/Si3N4/Si(100) Stack Structures -Photoelectron Spectroscopy
    F. Takeno; A. Ohta; S. Miyazaki; K. Komeda; M. Horikawa; K. Koyama
    Transactions of the Materials Research Society of Japan, Mar. 2005, 30(1):213-217, Refereed
  • Impact of rapid thermal O-2 anneal on dielectric stack structures of hafnium aluminate and silicon dioxide formed on Si(100)
    A Ohta; H Nakagawa; H Murakami; S Higashi; T Kawahara; K Torii; S Miyazaki
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, Nov. 2004, 43(11B):7831 - 7836, Refereed
  • Characterization of interfacial oxide layers in heterostructures of hafnium oxides formed on NH3-nitrided Si(100)
    H Nakagawa; A Ohta; F Takeno; S Nagamachi; H Murakami; S Higashi; S Miyazaki
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, Nov. 2004, 43(11B):7890 - 7894, Refereed
  • Photoelectron spectroscopy of ultrathin yttrium oxide films on Si(100)
    A Ohta; M Yamaoka; S Miyazaki
    MICROELECTRONIC ENGINEERING, Apr. 2004, 72(1-4):154 - 159, Refereed
■ Research Themes
  • 絶縁性基板上のゲルマニウム二次元結晶の創製と電子物性の解明 (代表)
    日本学術振興会, 科学研究費助成事業, 基盤研究(B)
    Apr. 2019 - Present
  • ゲルマニウム系二次元ハニカム結晶の自己組織化形成と結晶構造・電子状態制御 (代表)
    科学研究費助成事業, 挑戦的研究(萌芽)
    Jun. 2018 - Present
  • Si-Ge系スーパーアトム構造のセルフアライン集積による光・電子物性制御 (分担)
    日本学術振興会, 科学研究費助成事業, 基盤研究(S)
    Jul. 2015 - Mar. 2019
  • Si系酸化薄膜抵抗変化材料における欠陥分布の高感度計測および精密制御 (代表)
    日本学術振興会, 科学研究費助成事業, 若手研究(A)
    Apr. 2015 - Mar. 2018
  • シリコン系二次元ハニカム結晶の創製と電子物性の解明 (代表)
    日本学術振興会, 科学研究費助成事業, 挑戦的萌芽研究
    Apr. 2015 - Mar. 2017
  • 磁性合金ナノドットハイブリッド集積によるスピン物性制御と新機能メモリ応用 (分担)
    日本学術振興会, 科学研究費助成事業, 基盤研究(A)
    Apr. 2015 - Jun. 2015
  • シリコン酸化薄膜を用いた微細抵抗変化型メモリの研究 (代表)
    日本学術振興会, 科学研究費助成事業, 若手研究(B)
    Apr. 2013 - Mar. 2015
  • Ti系酸化膜を用いた抵抗変化型メモリの化学結合状態と抵抗変化現象の相関の解明 (代表)
    日本学術振興会, 科学研究費助成事業, 若手研究(スタートアップ)
    Apr. 2009 - Mar. 2011
  • 次世代MOSトランジスタ用Hf系高誘電率ゲート絶縁膜の研究
    日本学術振興会, 科学研究費助成事業, 特別研究員奨励費
    Apr. 2007 - Mar. 2009